Marathon® CP Cryopumps

Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes.

SHI offers a wide range of Cryopump products. Marathon® CP Series Cryopumps are offered with standard and low profile enclosures, all industry-standard flanges and both manual and automatic features. They can be serviced via “hot swap” without breaking vacuum, which allows for greater system up-time.

Marathon® CP-8 Cryopump

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Two (2) cryopumps operating with one (1) HC-8E4 or F-70L/H Compressor
  • Displex® Technology

Standard scope of Supply

  • CP-8 Cryopump
  • Zephyr®, HC-4E1, HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit

Specifications

Specifications
Pumping Speed Air 1,500 liters/second
Water 4,200 liters/second
Argon 1,250 liters/second
Hydrogen 2,300 liters/second
Throughput Argon 11.0 torr-liters/second
(870 sccm)
Capacity Argon (at 1×10-6 torr) 1,200 standard liters
Hydrogen (at 5×10-6 torr) 25 standard liters
Crossover Rating 220 torr-liters
Cooldown Time to 20 K 75 Minutes
Weight 16.8 kg (37 lbs.)
Dimensions (H) 516 mm (20.3 in.)
Maintenance 13,000 Hours

Specifications subject to change without notice.

Marathon® CP-8LP Cryopump

Available Configurations

  • Standard Low Profile Design in Left or Right Hand Configurations
  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Two (2) cryopumps operating with one (1) HC-8E4 or F-70L/H Compressor
  • Displex® Technology

Standard scope of Supply

  • CP-8LP Cryopump
  • Zephyr®, HC-4E1, HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit

Specifications

Specifications
Pumping Speed Air 1,800 liters/second
Water 4,200 liters/second
Argon 1,500 liters/second
Hydrogen 3,000 liters/second
Throughput Argon 11.0 torr-liters/second
(870 sccm)
Capacity Argon (at 1×10-6 torr) 1,600 standard liters
Hydrogen (at 5×10-6 torr) 23 standard liters
Crossover Rating 220 torr-liters
Cooldown Time to 20 K 110 Minutes
Weight 17.9 kg (39.5 lbs.)
Dimensions (H) 186 x 565 mm
(7.3 x 22.3 in.)
Maintenance 13,000 Hours

Specifications subject to change without notice.

Marathon® CP-250LP Cryopump

Available Configurations

  • Standard Low Profile Design in Left or Right Hand Configurations
  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Two (2) cryopumps operating with one (1) HC-8E4 or F-70L/H Compressor
  • Displex® Technology

Standard scope of Supply

  • CP-250LP Cryopump
  • Zephyr®, HC-4E1, HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit

Specifications

Specifications
Pumping Speed Air 3,000 liters/second
Water 6,300 liters/second
Argon 2,500 liters/second
Hydrogen 5,000 liters/second
Throughput Argon 11.0 torr-liters/second
(870 sccm)
Capacity Argon (at 1×10-6 torr) 1,600 standard liters
Hydrogen (at 5×10-6 torr) 30 standard liters
Crossover Rating 300 torr-liters
Cooldown Time to 20 K 110 Minutes
Weight 20.0 kg (44.0 lbs.)
Dimensions (H) 181 x 591 mm
(7.2 x 23.2 in.)
Maintenance 13,000 Hours

Specifications subject to change without notice.

Marathon® CP-12 Cryopump

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® Technology

Standard scope of Supply

  • CP-12 Cryopump
  • HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit

Specifications

Specifications
Pumping Speed Air 3,600 liters/second
Water 9,560 liters/second
Argon 3,100 liters/second
Hydrogen 7,300 liters/second
Throughput Argon 12.6 torr-liters/second
(1000 sccm)
Capacity Argon (at 1×10-6 torr) 3,100 standard liters
Hydrogen (at 5×10-6 torr) 50 standard liters
Crossover Rating 650 torr-liters
Cooldown Time to 20 K 90 Minutes
Weight 40.8 kg (90.0 lbs.)
Dimensions (H) 600 mm
(23.5 in.)
Maintenance 13,000 Hours

Specifications subject to change without notice.

Marathon® CP-16 Cryopump

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® Technology

Standard scope of Supply

  • CP-16 Cryopump
  • HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit

Specifications

Specifications
Pumping Speed Air 4,800 liters/second
Water 17,300 liters/second
Argon 4,100 liters/second
Hydrogen 12,000 liters/second
Throughput Argon 11.4 torr-liters/second
(900 sccm)
Capacity Argon (at 1×10-6 torr) 5,500 standard liters
Hydrogen (at 5×10-6 torr) 50 standard liters
Crossover Rating 500 torr-liters
Cooldown Time to 20 K 135 Minutes
Weight 49.9 kg (110.0 lbs.)
Dimensions (H) 633 mm
(24.9 in.)
Maintenance 13,000 Hours

Specifications subject to change without notice.

Marathon® CP-20 Cryopump

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® Technology

Standard scope of Supply

  • CP-20 Cryopump
  • F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit

Specifications

Specifications
Pumping Speed Air 9,700 liters/second
Water 29,100 liters/second
Argon 8,300 liters/second
Hydrogen 14,000 liters/second
Throughput Argon 11.3 torr-liters/second
(895 sccm)
Capacity Argon (at 1×10-6 torr) 6,000 standard liters
Hydrogen (at 5×10-6 torr) 33 standard liters
Crossover Rating 400 torr-liters
Cooldown Time to 20 K 190 Minutes
Weight 77.1 kg (170.0 lbs.)
Dimensions (H) 569 mm
(22.4 in.)
Maintenance 13,000 Hours

Specifications subject to change without notice.