SICERA® CP Cryopumps

The energy-saving features in SICERA® Cryopumps make them ideal for semiconductor-related manufacturing.

SICERA® Cryopumps and Compressors are designed with SHI’s proprietary inverter technology to greatly reduce customer energy costs. Our proprietary design also results in longer uptime, while maintaining transparent process conditions. The resulting savings and increased throughput make SICERA® ideal for semiconductor-related manufacturing.

SICERA® KZ-8L Cryopump

Available Configurations

  • ICF 253 mm Flange
  • Standard Fully-Automated Operation
  • SHI Proprietary Inverter Technology

Standard scope of Supply

  • KZ-8L Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

Specifications

Specifications
Pumping Speed Air 1,500 liters/second
Water 4,000 liters/second
Argon 1,200 liters/second
Hydrogen 2,200 liters/second
Throughput Argon 8.8 torr-liters/second
(700 sccm)
Capacity Argon (at 1×10-6 torr) 1,000 standard liters
Hydrogen (at 5×10-6 torr) 16 standard liters
Crossover Rating 150 torr-liters
Cooldown Time 70 Minutes
Weight 32 kg (70.6 lbs.)
Dimensions (HxWxD) 230 x 415 x 615 mm
(9.1 x 16.3 x 24.2 in.)
Maintenance 12,000 Hours
Inlet Flange ICF 253 mm

Specifications subject to change without notice.

SICERA® KZ-12L Cryopump

Available Configurations

  • ANSI 10 in. Flange
  • Standard Fully-Automated Operation
  • SHI Proprietary Inverter Technology

Standard scope of Supply

  • KZ-12L Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

Specifications

Specifications
Pumping Speed Air 4,500 liters/second
Water 9,500 liters/second
Argon 3,500 liters/second
Hydrogen 5,500 liters/second
Throughput Argon 11.3 torr-liters/second
(900 sccm)
Capacity Argon (at 1×10-6 torr) 2,000 standard liters
Hydrogen (at 5×10-6 torr) 35 standard liters
Crossover Rating 150 torr-liters
Cooldown Time 100 Minutes
Weight 40 kg (88.2 lbs.)
Dimensions (HxWxD) 230 x 518 x 689 mm
(9.1 x 20.4 x 27.1 in.)
Maintenance 12,000 Hours
Inlet Flange ANSI 10 in.

Specifications subject to change without notice.