APD, Marathon and CP Series Cryopumps can be serviced
via “hot swap” on-site by the customer or a trained
technician from SHI, without breaking vacuum or removing the cryopump from the chamber for return or replacement.
This unique service option is the result of the high-quality, ultra-reliable Displex® Cryocooler technology found in all APD, Marathon and CP Series Cryopumps.
Displex Cryocoolers have a long and successful operating history, and feature
a pneumatic drive that optimizes performance, reliability and maintainability.
SICERA Cryopumps can be returned to one of our service
centers for routine maintenance, service or complete
refurbishment.
Additional SICERA pumps and CSW-61 compressors are available as “exchange
units.” Simply install the exchange unit and the returned unit will be refurbished
and placed “on the shelf” ready for the next exchange.