APD, Marathon and CP Series Cryopumps can be serviced
via “hot swap” on-site by the customer or a trained
technician from SHI, without breaking vacuum or removing the cryopump from the chamber for return or replacement.
This unique service option is the result of the high-quality, ultra-reliable Displex® Cryocooler technology found in all APD, Marathon and CP Series Cryopumps.
Displex Cryocoolers have a long and successful operating history, and feature
a pneumatic drive that optimizes performance, reliability and maintainability.
SICERA Cryopumps can be returned to one of our service
centers for routine maintenance, service or complete
Additional SICERA pumps and CSW-61 compressors are available as “exchange
units.” Simply install the exchange unit and the returned unit will be refurbished
and placed “on the shelf” ready for the next exchange.